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Title:
STORAGE DEVICE
Document Type and Number:
Japanese Patent JP2019057554
Kind Code:
A
Abstract:
To provide a storage device in which a contact resistance is reduced.SOLUTION: A storage device comprises: a transistor part having a transistor; a plurality of interlayer insulation films provided to an upper direction of the transistor part; a plurality of first conductive layers provided to between the plurality of interlayer insulation films; and a second conductive layer that penetrates the plurality of interlayer insulation films and the plurality of first conductive layers, and in which one end is electrically connected to the transistor part, and one part is provided to a lower direction from the transistor part.SELECTED DRAWING: Figure 1

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Inventors:
ODA MINORU
YOTSUMOTO SATOSHI
NODA KOTARO
Application Number:
JP2017179788A
Publication Date:
April 11, 2019
Filing Date:
September 20, 2017
Export Citation:
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Assignee:
TOSHIBA MEMORY CORP
International Classes:
H01L21/8239; H01L27/10; H01L27/105; H01L45/00
Attorney, Agent or Firm:
Tetsuma Ikegami
Akira Sudo
Masahiro Takashita
Mitsuyuki Matsuyama



 
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