Title:
STORAGE DEVICE
Document Type and Number:
Japanese Patent JP2019057555
Kind Code:
A
Abstract:
To provide a storage device which is easy in writing.SOLUTION: A storage device includes: a first interlayer insulation film extending in a first direction; a second interlayer insulation film extending in the first direction; a first conductive layer which extends in the first direction and provided between the first interlayer insulation film and the second interlayer insulation film; a second conductive layer extending in a second direction intersecting with the first direction; a resistance change layer having a first portion provided between the first interlayer insulation film and the second interlayer insulation film, and a second portion provided among the second conductive layer, the first interlayer insulation film, the first conductive layer and the second interlayer insulation film; and a side wall insulation film provided between the first portion and the first interlayer insulation film and between the first portion and the second interlayer insulation film.SELECTED DRAWING: Figure 1
Inventors:
ISHIKAWA TAKAYUKI
OKAJIMA MUTSUMI
TSUKAMOTO TAKAYUKI
OKAJIMA MUTSUMI
TSUKAMOTO TAKAYUKI
Application Number:
JP2017179789A
Publication Date:
April 11, 2019
Filing Date:
September 20, 2017
Export Citation:
Assignee:
TOSHIBA MEMORY CORP
International Classes:
H01L21/8239; H01L27/10; H01L27/105; H01L45/00; H01L49/00
Attorney, Agent or Firm:
Tetsuma Ikegami
Akira Sudo
Masahiro Takashita
Mitsuyuki Matsuyama
Akira Sudo
Masahiro Takashita
Mitsuyuki Matsuyama