Title:
STORAGE DEVICE
Document Type and Number:
Japanese Patent JP2019057556
Kind Code:
A
Abstract:
To provide a storage device having improved reliability.SOLUTION: A storage device of an embodiment comprises: a first conductive layer extending in a first direction; a second conductive layer extending in the first direction; a third conductive layer extending in a second direction intersecting the first direction; a first oxide region provided between the first conductive layer and the second conductive layer and between the second conductive layer and the third conductive layer; and semiconductor regions provided respectively between the first conductive layer and the first oxide region and between the first conductive layer and the second conductive layer. A second distance between the third conductive layer and the semiconductor region provided between the first conductive layer and the second conductive layer is longer than a first distance between the third conductive layer and the semiconductor region provided between the first conductive layer and the first oxide region.SELECTED DRAWING: Figure 1
Inventors:
SUZUKI KUNIFUMI
YAMAMOTO KAZUHIKO
YAMAMOTO KAZUHIKO
Application Number:
JP2017179811A
Publication Date:
April 11, 2019
Filing Date:
September 20, 2017
Export Citation:
Assignee:
TOSHIBA MEMORY CORP
International Classes:
H01L21/8239; H01L27/105; H01L45/00; H01L49/00
Attorney, Agent or Firm:
Tetsuma Ikegami
Akira Sudo
Masahiro Takashita
Mitsuyuki Matsuyama
Akira Sudo
Masahiro Takashita
Mitsuyuki Matsuyama