Title:
GYROSCOPIC DEVICE
Document Type and Number:
Japanese Patent JP3181368
Kind Code:
B2
Abstract:
PURPOSE: To detect input angular velocity on the basis of the change of the electrostatic capacity obtained from the detection electrodes corresponding to the respective inclined planes of a gyroscopic device, especially, a vibrator having a triangular cross section.
CONSTITUTION: In a gyroscopic device, the vibrator 1 supported on a support member 2 in a freely vibratory state and having a triangular cross section is used. The detection electrodes 3, 4 corresponding to the vibrator 1 are constituted of a silicon substrate along with the vibrator and input angular velocity is detected on the basis of the change of electrostatic capacity.
Inventors:
Tatsuo Shiozawa
Kazusuke Maenaka
Kazusuke Maenaka
Application Number:
JP12740292A
Publication Date:
July 03, 2001
Filing Date:
May 20, 1992
Export Citation:
Assignee:
Tamagawa Seiki Co., Ltd.
International Classes:
G01C19/56; G01C19/5642; (IPC1-7): G01C19/56; G01P9/04
Domestic Patent References:
| JP61114123A | ||||
| JP57160067A | ||||
| JP6073414A | ||||
| JP251066A | ||||
| JP61139719A | ||||
| JP5203449A | ||||
| JP6039924U |
Attorney, Agent or Firm:
Soga Doteru (6 people outside)