STRAIGHT-LINE INTRODUCING MACHINE

Title:

STRAIGHT-LINE INTRODUCING MACHINE

Document Type and Number:

Japanese Patent JPS629896

Kind Code:

A

Inventors:

MIZUMOTO MUNEO
KANETOMO MASABUMI
YAMAGUCHI SUMIO

Application Number:

JP14468185A

Publication Date:

January 17, 1987

Filing Date:

July 03, 1985

Export Citation:

Assignee:

HITACHI LTD

International Classes:

B25J21/00; H01L21/67; H01L21/677; H01L21/68; (IPC1-7): B25J21/00; H01L21/68

Attorney, Agent or Firm:

Katsuo Ogawa

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