Title:
STRATIFIED STRUCTURE WITH FERROELECTRIC LAYER AND PROCESS FOR PRODUCING THE SAME
Document Type and Number:
Japanese Patent JP2011155271
Kind Code:
A
Abstract:
To provide a layer structure including a substrate, a platinum layer, and a ferroelectric layer which has enhanced adhesiveness between the platinum layer and the substrate.
The layer structure includes a substrate S, a platinum layer PS, and a ferroelectric layer FS formed on the platinum layer PS; a surface OS of the substrate S contains silicon dioxide; and an intermediate layer ZS, formed of amorphous aluminum oxide, is provided between the substrate S and the platinum layer PS. The intermediate layer ZS enhances the morphology of the ferroelectric layer FS and ensures uniformity of the layer structure.
Inventors:
BRUCHHAUS RAINER
PITZER DANA
PITZER DANA
Application Number:
JP2011044725A
Publication Date:
August 11, 2011
Filing Date:
March 02, 2011
Export Citation:
Assignee:
PYREOS LTD
International Classes:
H01L21/8246; H01L27/04; H01L21/02; H01L21/316; H01L21/3205; H01L21/822; H01L27/105; H01L27/115; H01L27/11502; H01L37/02; H01L41/09
Attorney, Agent or Firm:
Takuya Kuno
Toshio Yano
Kimihiro Hoshi
Hiroyasu Ninomiya
Einzel Felix-Reinhard
Toshio Yano
Kimihiro Hoshi
Hiroyasu Ninomiya
Einzel Felix-Reinhard
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