Title:
STRIPPER AND THIN FILM REMOVING METHOD
Document Type and Number:
Japanese Patent JP2005286208
Kind Code:
A
Abstract:
To provide a stripper which can neatly remove the unwanted part of a thin film formed on a substrate with a little amount thereof in a short time, and which can be dried up in a short time after finishing the removal of the thin film.
This is a stripper for peeling off and removing the unwanted part of the thin film formed on the substrate. The remover contains a mixed solvent of at least one or more kinds of high boiling point organic solvents having a boiling point of ≥120°C and one and more kinds of low boiling point organic solvents having a boiling point of ≤90°C.
Inventors:
SUZUKI MASAYUKI
TAJIKA ATSUSHI
YAMAMOTO TAKAHIRO
TAJIKA ATSUSHI
YAMAMOTO TAKAHIRO
Application Number:
JP2004100216A
Publication Date:
October 13, 2005
Filing Date:
March 30, 2004
Export Citation:
Assignee:
SHINETSU CHEMICAL CO
International Classes:
C09D9/00; G03F1/68; G03F1/82; G03F7/42; H01L21/027; H01L21/304; (IPC1-7): H01L21/027; C09D9/00; G03F1/08; G03F7/42; H01L21/304
Domestic Patent References:
| JPH03502255A | 1991-05-23 | |||
| JP2000091212A | 2000-03-31 | |||
| JP2003114538A | 2003-04-18 | |||
| JPH09308868A | 1997-12-02 | |||
| JP2004128251A | 2004-04-22 | |||
| JP2004006765A | 2004-01-08 | |||
| JP2003324052A | 2003-11-14 | |||
| JP2001188360A | 2001-07-10 | |||
| JP2003109896A | 2003-04-11 | |||
| JP2001159826A | 2001-06-12 |
Attorney, Agent or Firm:
Mikio Yoshimiya