Title:
STRIPPING AGENT COMPOSITION
Document Type and Number:
Japanese Patent JP3474127
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a stripping agent composition excellent in resist strippability and capable of improving the corrosion preventing effect for various members such as the metal wiring and metal thin film of a semiconductor device and an LCD by incorporating specified amts. of org. acid and/or its salt, water and org. solvent and specifying pH of the mixture.
SOLUTION: This composition contains the org. acid and/or its salt of 0.01 to 90 wt.% in order to obtain excellent resist strippability, and preferably of 0.05 to 70 wt.% and more preferably of 0.1 to 50 wt.% in order to obtain excellent resist strippability and corrosion prevention for a metal material. The composition contains preferably water of 5 to 70 wt.%, more preferably of 10 to 60 wt.% and further preferably of 15 to 50 wt.%. As the org. solvent, a solvent which can be dissolved by ≥0.5 wt.% in water at 25°C is preferably used, and more preferably by ≥4 wt.%, and further preferably by ≥7 wt.%. The pH of the composition is required to be <8.
Inventors:
Mami Shirota
Kozo Kitazawa
Eiji Kashihara
Eiji Nagoshi
Kozo Kitazawa
Eiji Kashihara
Eiji Nagoshi
Application Number:
JP20035399A
Publication Date:
December 08, 2003
Filing Date:
July 14, 1999
Export Citation:
Assignee:
Kao Corporation
International Classes:
H01L21/027; C09D9/00; G03F7/42; (IPC1-7): G03F7/42; C09D9/00; H01L21/027
Domestic Patent References:
| JP1152588A | ||||
| JP922122A | ||||
| JP4359257A | ||||
| JP9197681A | ||||
| JP1055993A | ||||
| JP7271056A |
Attorney, Agent or Firm:
Yoshinori Hosoda
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