PURPOSE: To prevent the interference with other peripheral parts and members and the occurrence of dust in a clean room, increase the storage quantities of wires and pipes, prolong the life, and facilitate the exchanging work.
CONSTITUTION: A link mechanism 11 moved after the rotation of arms 3, 5 is provided between a robot main body 1 and a hand 6. The link mechanism 11 is provided with the first link member 14 rotatably supported on the robot main body 1 at one end and the second link member 16 rotatably connected to the other end of the first link member 14 at one end and rotatably connected to the second arm 5 at the other end. The first link member 14 is arranged to be moved in the same plane as the first arm 3, and the second link member 16 is arranged to be moved in the same plane as the second arm 5 respectively. The first and second link members 14, 16 are hollow, and wires such as power lines and signal lines and pipes such as air feed pipes guided by the hand 6 are arranged in the hollow spaces.
KATO TAKASHI