STRUCTURE CARRIER OF ELECTRON BEAM DEVICE, AND THE ELECTRON BEAM DEVICE

Title:

STRUCTURE CARRIER OF ELECTRON BEAM DEVICE, AND THE ELECTRON BEAM DEVICE

Document Type and Number:

Japanese Patent JP3667138

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a desired electron beam trajectory by controlling charge to a structure carrier.
SOLUTION: This device is composed of electron sources 1012 for emitting electrons, an electron beam-irradiated part 1018 on which the electrons emitted from the electron sources are irradiated, a structure carrier 1020 arranged between the electron sources 1012 and the electron beam-irradiated part 1018. In this case, the cross-sectional shape of the structure carrier 1020 in a direction of the plane including a line segment connecting the electron sources to the electron beam-irradiated part is nearly trapezoidal, and its trapezoidal sidewall has a structure which expands in a direction from the electron sources 1012 to the electron beam-irradiated part 1018.

Inventors:

Naofumi Higashi

Application Number:

JP5154899A

Publication Date:

July 06, 2005

Filing Date:

February 26, 1999

Export Citation:

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