Title:
STRUCTURE FOR DETECTIION PART OF GAS RATE SENSOR
Document Type and Number:
Japanese Patent JP2008224368
Kind Code:
A
Abstract:
To obtain high-precision sensing resistors without having to use welding, or the like, by forming the resistors of platinum thin films formed on a substrate by vapor deposited layer.
A detecting part structure for a gas sensor is a structure in which electrode pads (50) in square portions (40) of the substrate (10), and the sensing resistors (51) in thin connection sections (41) between the square portions (40) are formed of platinum thin films through vapor deposition.
Inventors:
IMAMURA TSUNEHIKO
Application Number:
JP2007061838A
Publication Date:
September 25, 2008
Filing Date:
March 12, 2007
Export Citation:
Assignee:
TAMAGAWA SEIKI CO LTD
International Classes:
G01C19/00
Attorney, Agent or Firm:
Michiharu Soga
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order
Masahiro Taguchi
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order
Masahiro Taguchi
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