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Title:
STRUCTURE FOR FLOW RATE MEASUREMENT AND FLOW RATE MEASURING EQUIPMENT
Document Type and Number:
Japanese Patent JP2012026930
Kind Code:
A
Abstract:

To suppress dust from intruding into a diversion part in diversion type flow rate measuring equipment.

A structure 10 for flow rate measurement to be used for flow rate measuring equipment 1 is provided with: a conduit part 20 through which gas to be measured flows; and a diversion part 21 for diverting gas flowing through the conduit part 20, and for introducing the diverted gas to a detection element 12 for measuring the flow rate of the gas. An introduction port 31 of the diversion part 21 is formed in the peripheral part in the conduit part 20. The conduit part 20 is formed at the upstream of the introduction port 31, and provided with an inclination part 50 for guiding the gas to a central part in the conduit part 20.


Inventors:
UEDA NAOTSUGU
YAMAMOTO KATSUYUKI
NOZOE SATOSHI
MAEDA SHUJI
TSUKUMA YUJI
Application Number:
JP2010167416A
Publication Date:
February 09, 2012
Filing Date:
July 26, 2010
Export Citation:
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Assignee:
OMRON TATEISI ELECTRONICS CO
International Classes:
G01F1/00; G01F1/684; G01F1/692
Domestic Patent References:
JP2003176740A2003-06-27
JPS58105013A1983-06-22
JP2006078487A2006-03-23
JPS5860228U1983-04-23
JP2009287982A2009-12-10
JPS58105013A1983-06-22
JP2003176740A2003-06-27
Foreign References:
WO2005005932A12005-01-20
Attorney, Agent or Firm:
Yoshihisa Masui
Jun Himura