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Title:
STRUCTURE AND ITS MANUFACTURE FOR SURFACE ACOUSTIC WAVE CONVERTER WITH MINUTE INTERDIGITAL GAP
Document Type and Number:
Japanese Patent JPH03219716
Kind Code:
A
Abstract:

PURPOSE: To prevent short-circuit between electrode digits and to facilitate the manufacture by forming selectively a metal oxide only to a side ridge of the electrode digit in the manufacture process of a converter.

CONSTITUTION: Electrode digits 4, 5 of a couple of IDT electrodes, a reflection slit 6 along a propagation direction of a surface acoustic wave are arranged alternately at an electrode digit width and gap of λ/4 basically on the surface of a piezoelectric substrate 1. In order to prevent occurrence of short-circuit between electrode digit, oxidation or anodic oxidation is applied to side parts of a half of the electrode digits 4 and the slits 6 to obtain a metal oxide 7. At the manufacture of the converter, a metallic film 19 is adhered to the entire surface of the substrate 1, covered with a photoresist 20, exposed via a mask 21, a surface exposed part of the film 19 is removed after the development to form the metallic oxide 7 to the side ridge of the film 19 under the remaining resist 20, the metallic film 22 is adhered entirely by using the resist 20 as a mask and the remaining resist 20 is removed together with the film 22 adhered to the surface.


Inventors:
YAMANOUCHI KAZUHIKO
Application Number:
JP26471789A
Publication Date:
September 27, 1991
Filing Date:
October 11, 1989
Export Citation:
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Assignee:
YAMANOCHI KAZUHIKO
International Classes:
H03H3/08; H03H9/02; H03H9/145; (IPC1-7): H03H3/08; H03H9/145
Domestic Patent References:
JPS60244108A1985-12-04
JPS6090416A1985-05-21
JPS58154914A1983-09-14
Attorney, Agent or Firm:
Suzuki Hitoshi