Title:
Structure lighting viewing device
Document Type and Number:
Japanese Patent JP5939301
Kind Code:
B2
Abstract:
In order to reduce both the luminance irregularity inside a frame and the luminance irregularity between frames, an example of an observation device according to the present invention comprises an illumination optical system for illuminating a sample with laser light from a laser light source, and an imaging unit for repeatedly imaging the sample illuminated by the illumination optical system. The illumination optical system includes a light diffusion element and a control unit for periodically changing the diffusion pattern in the region of the light diffusion element onto which the laser light is irradiated. The control unit performs a setting so that the changes in the diffusion pattern during imaging operation match with each other among a plurality of the repeated imaging operations.
Inventors:
Yumiko Ouchi
Application Number:
JP2014528003A
Publication Date:
June 22, 2016
Filing Date:
July 31, 2013
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B21/06; G01N21/64
Domestic Patent References:
| JP2013088808A | 2013-05-13 | |||
| JP3107388U | 2005-02-03 | |||
| JPH08233544A | 1996-09-13 | |||
| JP2000275534A | 2000-10-06 | |||
| JP2013088808A | 2013-05-13 | |||
| JP2007233371A | 2007-09-13 |
Foreign References:
| WO2008072597A1 | 2008-06-19 | |||
| WO2009069675A1 | 2009-06-04 |
Attorney, Agent or Firm:
Furuya Fumio
Toshihide Mori
Toshihide Mori
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