Title:
STRUCTURE AND MANUFACTURE OF SUPERCONDUCTOR WIRING
Document Type and Number:
Japanese Patent JPH01145879
Kind Code:
A
Abstract:
PURPOSE:To realize reliability without change with the lapse of time, by forming an insulating layer of a composite oxide which is by excluding either one group of elements from three kinds of element groups and by providing superconductor wiring of a wiring layer which is made of superconductive materials including three specific elements. CONSTITUTION:A wiring layer is formed of one or plural elements of scandium, yttrium, and lanthanoid, one or plural elements of alkaline earth metals, and superconductive material including composite oxide of copper. An insulating layer covering the wiring layer is formed of a composite oxide which is made of elements by excluding either one element group from three kinds of element groups. A substrate 11 is coated with an insulating layer 13 of a predetermined thickness. The insulating layer 13 is formed of a composite oxide (Y-Cu-O) of yttrium and copper. An ion implantation method is used to implant barium from above of a photoresist layer 21 and an insulating layer 13. A wiring layer 15 of superconductor (Y-Ba-Cu-O composite oxide) is formed as a result of heat treatment.
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Inventors:
MURAKAMI YOSHIO
SUGIHARA TADASHI
TAKESHITA TAKUO
SUGIHARA TADASHI
TAKESHITA TAKUO
Application Number:
JP30537087A
Publication Date:
June 07, 1989
Filing Date:
December 01, 1987
Export Citation:
Assignee:
MITSUBISHI METAL CORP
International Classes:
C04B41/80; C01G1/00; H01B12/06; H01B13/00; H01L39/06; H01L39/24; (IPC1-7): C04B41/80; H01B12/06; H01B13/00; H01L39/06; H01L39/24
Attorney, Agent or Firm:
Abe Ituro
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