Title:
STRUCTURE, AND MANUFACTURING METHOD OF THE SAME
Document Type and Number:
Japanese Patent JP2019184780
Kind Code:
A
Abstract:
To provide a structure in which a metal foil or metal film is formed in grooves having a high aspect ratio or holes formed in a substrate, and provide a manufacturing method of the structure.SOLUTION: A structure 100 includes: a substrate 102 having at least one groove 104; and a metal film 106 located in the groove. A bottom surface 104b of the groove has a plurality of projections having a material contained in the substrate, and at least one of the plurality of projections has an aspect ratio that is more than 1 and 50 or less. At least one of the plurality of projections has a height of 100 nm or more and 20 μm or less. The plurality of projections may be selectively distributed near a side wall 104a of the groove or near the center part of the bottom surface.SELECTED DRAWING: Figure 2
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Inventors:
OZAWA YUTAKA
Application Number:
JP2018074573A
Publication Date:
October 24, 2019
Filing Date:
April 09, 2018
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD
International Classes:
G02B5/18; H01L21/3205; H01L21/768; H01L23/522
Domestic Patent References:
| JP2012079960A | 2012-04-19 | |||
| JP2014093351A | 2014-05-19 | |||
| JP2005085983A | 2005-03-31 | |||
| JP6070555B2 | 2017-02-01 | |||
| JP5420923B2 | 2014-02-19 | |||
| JP5773624B2 | 2015-09-02 | |||
| JP2011512010A | 2011-04-14 |
Foreign References:
| US20120099702A1 | 2012-04-26 | |||
| US20060006559A1 | 2006-01-12 |
Attorney, Agent or Firm:
Takahashi Hayashi & Partners