Title:
構造体、その製造方法、及び該構造体を用いたデバイス
Document Type and Number:
Japanese Patent JP4971612
Kind Code:
B2
Inventors:
Nobuhiro Yasui
Ryoko Horie
Toru Tada
Ryoko Horie
Toru Tada
Application Number:
JP2005258267A
Publication Date:
July 11, 2012
Filing Date:
September 06, 2005
Export Citation:
Assignee:
Canon Inc
International Classes:
B82B1/00; B82Y30/00; B82Y40/00; G11B5/65; G11B5/667; G11B5/738; H01J1/304; H01L29/06; H01L29/66
Domestic Patent References:
| JP2005068558A | ||||
| JP2005064246A | ||||
| JP2005064138A | ||||
| JP2005064137A | ||||
| JP2005052909A | ||||
| JP2005029779A | ||||
| JP2004237431A | ||||
| JP2003266400A | ||||
| JP2001318201A | ||||
| JP2001261376A | ||||
| JP9157062A | ||||
| JP2139714A |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa