Title:
構造化照明光学系および構造化照明顕微鏡装置
Document Type and Number:
Japanese Patent JP5751328
Kind Code:
B2
Abstract:
An illumination optical system includes: a beam splitter located near a conjugate position of a specimen and configured to split beams from a light source into a plurality of groups of beams having different splitting directions around an optical axis; a beam selector configured to select and transmit one group of beams from the plurality of groups of beams and that is rotatable with respect to the optical axis; and a ½ wavelength plate located near the beam selector and rotatable about the optical axis. The rotation angles of the ½ wavelength plate and of the beam selector about the optical axis are respectively set so that the polarization direction of the beam which has passed through the ½ wavelength plate is perpendicular to the splitting direction of the one group of beams that has been selected by the beam selector and split by the beam splitter.
Inventors:
Yumiko Ouchi
Application Number:
JP2013522439A
Publication Date:
July 22, 2015
Filing Date:
June 27, 2012
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B21/06; G02B21/36
Domestic Patent References:
| JP2010540999A | ||||
| JP201148070A |
Foreign References:
| WO2009031418A1 | ||||
| WO2007043314A1 |
Attorney, Agent or Firm:
Masago Onishi
Hiroshi Kawano
Namiki Toshiaki
Hiroshi Kawano
Namiki Toshiaki
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