Title:
SUBSIDIARY DEVICE FOR FILTER REPLACEMENT OF CLEAN ROOM
Document Type and Number:
Japanese Patent JP3774784
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To quickly and easily replace a damaged filter without generating contamination under a state wherein the operation of a production equipment, and the circulation of air are performed.
SOLUTION: This subsidiary device comprises a shielding plate 32, a supporting part 34 and a tube 38, and is inserted in the internal wall of the lower filter frame 28 of a filter 22. By expanding the tube 38 by press-feeding air into the tube 38, the tube 38 is press-bonded and fixed to the internal wall of the filter frame 28, and the stream of air at the lower filter frame 28 part of the damaged filter 22 is shut off.
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Inventors:
Hayashi Masaru
Kim Shun
Han Yu
Lee Jianfeng
Kim Shun
Han Yu
Lee Jianfeng
Application Number:
JP11086598A
Publication Date:
May 17, 2006
Filing Date:
April 21, 1998
Export Citation:
Assignee:
Samsung Electronics Co.,Ltd.
International Classes:
F24F7/06; B01D46/00; B01D46/10; B01D46/42; B01D46/44; B01D46/52; (IPC1-7): F24F7/06; B01D46/52
Domestic Patent References:
| JP10103730A |
Attorney, Agent or Firm:
Makoto Hagiwara
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