SUBSTITUTED CYCLOPENTADIENYL COBALT COMPLEX AND METHOD FOR PRODUCTION THEREOF, AND COBALT-CONTAINING THIN FILM, AND METHOD FOR PRODUCTION THEREOF

Title:

SUBSTITUTED CYCLOPENTADIENYL COBALT COMPLEX AND METHOD FOR PRODUCTION THEREOF, AND COBALT-CONTAINING THIN FILM, AND METHOD FOR PRODUCTION THEREOF

Document Type and Number:

Japanese Patent JP2018065777

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a cobalt complex which is useful for the production of a cobalt-containing thin film under conditions where no oxidizing gas is used.SOLUTION: A cobalt complex is represented by general formula (1) (where Ris a silyloxy group having three alkyl groups each of which has 1-6 carbon atoms; Ris H, a C1-6 alkyl group or R; R-Rindependently represent H or a C1-6 alkyl group; L is a C4-10 diene).SELECTED DRAWING: None

Inventors:

KOISO NAOYUKI
YAMAMOTO ARINORI
OIKE HIROYUKI
HAYAKAWA TEPPEI
FURUKAWA YASUSHI
TADA KENICHI

Application Number:

JP2016239566A

Publication Date:

April 26, 2018

Filing Date:

December 09, 2016

Export Citation:

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Assignee:

TOSOH CORP
SAGAMI CHEM RES INST

International Classes:

C07F19/00; C07F7/18; C07F15/06; C23C16/18; H01L21/28; H01L21/3205; H01L21/768; H01L21/8246; H01L23/532; H01L27/10; H01L27/105; H01L27/115; H01L29/417; H01L29/423; H01L29/49

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