Title:
基板吸着搬送装置
Document Type and Number:
Japanese Patent JP4889122
Kind Code:
B2
Inventors:
Yukio Yamagishi
Application Number:
JP2007239223A
Publication Date:
March 07, 2012
Filing Date:
September 14, 2007
Export Citation:
Assignee:
IBIDEN Engineering Co., Ltd.
International Classes:
B25J15/06; B65G49/05
Domestic Patent References:
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Attorney, Agent or Firm:
Patent Business Corporation Aichi International Patent Office