To provide a substrate baking device capable of reducing equipment cost and running cost, by improving energy efficiency, in a substrate baking processing device having a substrate shelf part composed of a plurality of stages.
This substrate baking device has a kiln 20 for forming a baking chamber V on the inside, an upstream side carrying passage for carrying a substrate toward this kiln, and a downstream side carrying passage for receiving and carrying the baking processing-finished substrate derived from the kiln. The kiln is internally attached with a substrate storage device 30 having a plurality of stages of substrate storage shelf stages 34 for successively receiving and holding the substrate carried by the upstream side carrying passage, and a lifting device 40 for lifting this substrate storage device. The lifting device successively lifts the substrate storage device for turning the substrate storage shelf stages for storing the baking processing-completed substrate to a position opposed to the downstream side carrying passage.
MURAOKA YUSUKE
KIMURA TAKAHIRO
Takao Ito
Jiro Higuchi