To provide a substrate before insulation processing having a protection film with high productivity and sufficient adhesive strength to the insulation processing; and to provide a manufacturing method of the substrate where only a desired range in a substrate surface is insulated, a manufacturing method of a surface acoustic wave vibrator, the surface acoustic wave vibrator manufactured by the manufacturing method, a surface acoustic wave device, and an electronic apparatus.
The manufacturing method of the substrate comprises a first process for heating a substrate 11 comprising a part having conductivity on a surface, a second process (Figure (b)) giving function liquid 30A on the substrate 11 so that a part of the part having conductivity is covered, a third process (Figure (c)) drying function liquid 30A and forming the substrate before insulation processing 12 which has the protection film 30 where a periphery-like outer edge is relatively thicker than a region except for the periphery-like outer edge on a surface, a fourth process (Figure (d)) performing the insulation processing on the surface of the substrate before insulation processing 12, and a fifth process (Figure (e)) peeling the protection film 30.
Fujitsuna Hideyoshi
Osamu Suzawa
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