To prevent a substrate from projecting from a substrate carrier, by a method wherein a door for opening and closing an inlet and outlet for the substrate is provided.

A substrate carrier 100 comprises a substrate accommodation part for accommodating a substrate; a door for opening and closing an inlet and outlet (a front face opening) of the substrate, leading to the substrate accommodation part; a detector for detecting a conveying state of the substrate carrier 100; and opening and closing means 103 for opening and closing a door based on detection results of the detector. The opening and closing means 103 is constituted by a horizontal shaft 6, a handle 7, bevel gears 8, 9 and a vertical shaft. If an operator lifts up the substrate carrier 100 on an arrangement pedestal by the handle 7, the handle 7 inclined horizontally is rotated at about 90°, is directed vertically, is brought into contact with support parts 4, 5 and is stopped. At this time, the vertical shaft is rotated at about 90° in communication with the horizontal shaft 6 via the bevel gears 8, 9, and is directed on the straight to a front face direction of the substrate carrier 100, and the door opened so as to release a front face opening is rotated so as to close the front face opening of the substrate carrier 100.