To stably carry a substrate without generating particles being the cause of substrate pollution.
This device has a plurality of carrier rollers 18 having a roller part 181 supporting the substrate W, a rotary shaft 182 and a first magnetic member 11 arranged on one end side of the rotary shaft 182, a first support part 101 rotatably supporting the other end side of the rotary shaft 182 of the respective carrier rollers 18, a second support part 102 arranging a second magnetic member 13 of the same polarity as the first magnetic member 11 in a position opposed to the first magnetic member 11 and journaling the one end side of the rotary shaft 182 of the respective carrier rollers 18 arranged near the center of the substrate in the direction orthogonal to the substrate carrying direction by resiliency between the first magnetic member 11 and the second magnetic member 13, and a driving motor. The carrier rollers 18 are supported by the first support part 101 and the second support pat 102, and are arranged at a specific interval to the adjacent carrier rollers 18.
OGAWA YOSHIHIRO
Takao Ito
Jiro Higuchi
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