To provide a carrying device preventing a substrate carried in inclination from cracking caused by guide rollers for supporting the substrate at its inclining-direction lower end face.
The carrying device comprises an arm body 35 having a first arm 37 and a second arm 38, a support 32 supporting the arm body at its base so that the first arm is located on the carrying-direction upstream side of the substrate, and a guide means 31 having the first guide roller 39 provided at the front end of the first arm and the second guide roller 40 provided at he front end of the second arm for guiding the substrate to be carried via a carrying roller while using the first and second guide rollers for supporting the substrate at its end face on the inclining-direction lower side. When the first guide roller receives the substrate at its end face on the inclining-direction lower side of the carrying-direction front end, the arm body rocks toward the carrying-direction upstream side of the substrate. In this state, when the second guide roller receives the substrate at its end face on the inclining-direction lower side of the carrying-direction front end, the arm body rocks downstream the substrate in the carrying direction.
Kurata Masatoshi
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Tetsuya Kazama
Katsumura Hiro
Shoji Kawai
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Takuzo Ichihara
Yamashita Gen
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