To carry substrates consistently along a predetermined horizontal surface at a predetermined speed.

This substrate carrying device includes a first carrying means 10 having a plurality of first movable beams 101, a second carrying means 20 having a plurality of second movable beams 201, first and second driving means 30 and 40 for individually driving the carrying means 10 and 20 with an advancing stroke, a lowering stroke, a reversing stroke and an elevating stroke as one cycle, and a control means 50 for controlling each driving means. The upper limit height of each carrying surface of the first carrying means 10 and the second carrying means 20 is set on a predetermined horizontal carrying surface S, and when each carrying surface is in the horizontal carrying surface S, the carrying means 10 and 20 are set to be the advancing stroke, and the operation of the carrying means 10 and 20 is controlled so that the advancing strokes locally overlap.