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Title:
SUBSTRATE CARRYING DEVICE
Document Type and Number:
Japanese Patent JP2006321623
Kind Code:
A
Abstract:

To provide a substrate carrying device, capable of changing a substrate to an inclined attitude when the substrate is being carried straight on a substrate carrying passage without reducing throughput of a substrate processing.

Each magnet gear 231 of a drive shaft 23 and a magnet gear 215 of each carrying roller 21 are disposed close to each other but not in contact. As the drive shaft 23 rotates by rotation drive force from a drive motor or the like, rotation drive force is transmitted from the magnet gear 231 of the drive shaft 23 toward a magnet gear 215 of the carrying roller 21. The carrying rollers 21 are gradually largely inclined from a horizontal attitude in a perpendicular direction to the carrying direction of the substrate B as they go from the carrying roller 21 upstream of the substrate carrying direction to the carrying roller 21 on the downstream side.


Inventors:
MATSUMOTO TAKAO
YAMAMOTO SATOSHI
Application Number:
JP2005147388A
Publication Date:
November 30, 2006
Filing Date:
May 19, 2005
Export Citation:
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Assignee:
DAINIPPON SCREEN MFG
International Classes:
B65G13/12; B08B3/02; B65G13/071; H01L21/304
Domestic Patent References:
JP2000031238A2000-01-28
JP2002265026A2002-09-18
JPH09278172A1997-10-28
Attorney, Agent or Firm:
Etsushi Kotani
Takao Ito
Jiro Higuchi



 
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