Title:
基板塗布装置
Document Type and Number:
Japanese Patent JP4275678
Kind Code:
B2
Inventors:
Mikio Masuichi
Yukihiro Takamura
Moriwaki Sanzo
Yukihiro Takamura
Moriwaki Sanzo
Application Number:
JP2006113069A
Publication Date:
June 10, 2009
Filing Date:
April 17, 2006
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B05C5/00; B05C11/10
Domestic Patent References:
| JP10137665A | ||||
| JP8236435A | ||||
| JP2000093865A | ||||
| JP2000157905A | ||||
| JP1293159A | ||||
| JP9293653A | ||||
| JP2000068188A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita