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Patent Searching and Data


Title:
SUBSTRATE CONVEYANCE DEVICE
Document Type and Number:
Japanese Patent JP2011190032
Kind Code:
A
Abstract:

To provide a substrate conveyance device capable of suppressing the damage to a substrate due to contact with a foreign substance adhered to a substrate contact surface of a roller for conveyance, while it is difficult to prevent the adhesion of a foreign substance, as the contact area between the roller for conveyance and the substrate is large when the substrate is directly conveyed without being loaded on a tray or the like by a roller conveyance system.

In the substrate conveyance device conveying a substrate by rotating a plurality of roller shafts arranged in the conveyance direction of the substrate and connected to a driving system, an integrated roller is formed by alternately connecting a plurality of ring rollers, each of which is narrow in width and has different radius, to the plurality of roller shafts, and a plurality of rollers are arranged on the roller shaft.


Inventors:
HANASAKI TAKENORI
Application Number:
JP2010057182A
Publication Date:
September 29, 2011
Filing Date:
March 15, 2010
Export Citation:
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Assignee:
CANON ANELVA CORP
International Classes:
B65G49/06; B65G13/04; B65G23/28; B65G39/04; H01L21/677
Attorney, Agent or Firm:
Iwata Today sentence
Sayori Seto