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Title:
SUBSTRATE CONVEYING APPARATUS, AND SUBSTRATE PROCESSING APPARATUS
Document Type and Number:
Japanese Patent JP2005093812
Kind Code:
A
Abstract:

To secure a sufficient space for maintenance work.

A conveying robot TR1 has a substrate holder 60, a supporting member 63, a first connecting member 640, and a second connecting member 641. The supporting member 63 is arranged at an end of the conveying robot TR1 so that the long axis of the supporting member 63 is in the Z-direction. A first connecting member 640 and a second connecting member 641 are fixed at the upper and lower ends of the supporting member 63, respectively, and are connected to a frame outside the conveying robot TR1, with their positions unchanged. The supporting member 63 cantilevers the substrate holder 60 at a level between the first connecting member 640 and the second connecting member 641.


Inventors:
Okamoto, Takeo
Taguchi, Takashi
Application Number:
JP2003000326527
Publication Date:
April 07, 2005
Filing Date:
September 18, 2003
Export Citation:
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Assignee:
DAINIPPON SCREEN MFG CO LTD
International Classes:
B25J9/02; B65G49/07; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B25J9/02; B65G49/07
Attorney, Agent or Firm:
吉田 茂明
吉竹 英俊
有田 貴弘