To prevent contamination of a substrate due to generated particles by separating a part in which particles are generated by means of a parting member.

In a substrate conveying device provided with a substrate supporting part 1 supporting a substrate, a slider 5, guide rails 9a, 9b which slide on a linear guide 15 arranged beneath the slider 5 so as to guide the substrate supporting part 1 and the slider 5 in the horizontal direction, a ball screw 11 which is engaged with an engaging part arranged beneath the slider 5 so as to move the slider 5 along the guide rails 9a, 9b, and a motor 11c, parting members 17 are arranged on both side faces in the moving direction of the slider 5 so as to separate the linear guide 15 and the engaging part in the moving direction.