Title:
SUBSTRATE CONVEYING AND TRANSFERRING DEVICE
Document Type and Number:
Japanese Patent JP2005239356
Kind Code:
A
Abstract:
To provide a substrate conveying and transferring device capable of easily and surely handling a substrate by an inexpensive device constitution.
This substrate conveying and transferring device 1 has a cassette 2 having a plurality of steps of accommodation parts accommodating a substrate 11, a bogie 4 loading and conveying the cassette 2, and a lifter 6 arranged opposite to a substrate processing device for elevating the cassette 2. A frame 4a of the bogie 4 loading the cassette 2 is fitted with a frame 22 of a lifter 6, and a servomotor 30 is rotated to raise an elevation plate 21. Then, the cassette 2 is elevated and moved, so that a desired accommodation part is opposed to an entrance/exit of the substrate of the processing device.
Inventors:
TASHIRO SHIGEYUKI
Application Number:
JP2004051755A
Publication Date:
September 08, 2005
Filing Date:
February 26, 2004
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
B65G1/00; B65G49/07; H01J9/46; H01L21/677; H01L21/68; (IPC1-7): B65G1/00; B65G49/07; H01J9/46; H01L21/68
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Sadao Muramatsu
Ryo Hashimoto
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