PURPOSE: To provide a substrate conveyor which can stably hold and convey substrates and surely separate the substrates from substrate holders to place them on a predetermined stage.

CONSTITUTION: A substrate conveyor comprises two hands 1a, 1b for holding substrates, an opening means for the hands 1a, 1b, substrate holders 7a, 7b each secured to at least one of the hands 1a, 1b, a substrate separation means, and a movement means for the hands 1a, 1b.