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Patent Searching and Data


Title:
SUBSTRATE DEVELOPMENT DEVICE
Document Type and Number:
Japanese Patent JPH0737787
Kind Code:
A
Abstract:

PURPOSE: To reduce development irregularity during development of a square substrate and to restrain wasteful consumption of developer by discharging developer from a developer supply part to a plurality of different positions in an upper surface of the held square substrate.

CONSTITUTION: When a substrate W is held by a substrate holding part 1, each of swing arms 10 to 12 is turned to an opposite position on the substrate W from a turnout position and each of discharge hoses 3 to 7 is arranged at a discharge position. Developer stored inside a developer storage container 23 is supplied to a flow path division manifold 21 through a supply piping 22 and a supply valve 24 and is discharged from each of the discharge hoses 3 to 7. Developer discharged from the discharge hoses 3 to 7 spreads in all directions on the substrate W due to fluidity of itself and forms a uniform application state all over the substrate W. Therefore, development irregularity is reduced and wasteful consumption of developer is restrained.


Inventors:
KIRIE KEIJI
IZEKI IZURU
Application Number:
JP18104993A
Publication Date:
February 07, 1995
Filing Date:
July 22, 1993
Export Citation:
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Assignee:
DAINIPPON SCREEN MFG
International Classes:
G03F7/30; H01L21/027; (IPC1-7): H01L21/027; G03F7/30
Attorney, Agent or Firm:
Yukio Ono (1 person outside)