To prevent the generation of a spot by removing a liquid residue by dispersing a suction in a substrate holding section.
Waterdrops are dispersed widely in the direction along the outer periphery of a substrate W more than a suction from one suction hole and are sucked as seen in a conventional example by the suction from the suction holes 71d through a porous member 73, and gas for a drying is sucked. Accordingly, waterdrops are sucked not only in the lower edge section of the substrate W positioned just above the suction holes 71d, but also in the arcuate sections R of the substrate W positioned on both outsides, and the gas is sucked sufficiently. Consequently, both outsides R at the lower edge of the substrate W are also dried sufficiently, and the generation of the spot resulting from the liquid residue is prevented.
MUNAKATA HIDEKI
NETSU SHIGECHIKA
ITO TATSUO
MURAOKA YUSUKE
ABIKO YOSHITAKA
FUJIKAWA KAZUNORI
SHINETSU HANDOTAI KK
DAINIPPON SCREEN MFG
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