SUBSTRATE DRYER AND SUBSTRATE DRYING METHOD USING THE SAME

Title:

SUBSTRATE DRYER AND SUBSTRATE DRYING METHOD USING THE SAME

Document Type and Number:

Japanese Patent JP3868804

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide an energy-efficient substrate dryer that dries a substrate efficiently by reducing air consumption, and also to provide a drying method using the device.
SOLUTION: A prismatic air knife nozzle 4 for blowing air over a surface 2a of a substrate 2 is arranged with a longitudinal direction slantingly crossing a substrate feed direction. The air knife nozzle 4 is divided into a first and a second air jet chamber 4c and 4d, and flow controllers 6a and 6b are disposed to control air quantities jetted by the first and second air jet chambers 4c and 4d. When the second air jet chamber 4d faces a trailing corner 2c of the substrate 2, the flow controllers 6a and 6b increase the air quantity for a blow jetted by the second air jet chamber 4d and stop an air jet by the first air jet chamber 4c.

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Inventors:

Hiroya Watanabe
Kenichi Mimori

Application Number:

JP2001361001A

Publication Date:

January 17, 2007

Filing Date:

November 27, 2001

Export Citation:

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Assignee:

ALPS ELECTRIC CO.,LTD.

International Classes:

F26B15/00; G02F1/13; F26B5/00; F26B21/00; F26B21/12; G02F1/1333; H01L21/302; H01L21/304; (IPC1-7): F26B15/00; F26B5/00; F26B21/00; F26B21/12; G02F1/13; G02F1/1333; //H01L21/304

Domestic Patent References:

JP11097408A
JP8159659A
JP2003077883A

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