Title:
基板の乾燥機
Document Type and Number:
Japanese Patent JP4176249
Kind Code:
B2
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Inventors:
Maruyama Masafumi
Application Number:
JP23159499A
Publication Date:
November 05, 2008
Filing Date:
August 18, 1999
Export Citation:
Assignee:
Furnace Co., Ltd.
International Classes:
F26B21/00; F26B15/00; F26B25/00
Domestic Patent References:
| JP10082583A | ||||
| JP7124513A | ||||
| JP60186686A | ||||
| JP49077707A | ||||
| JP58047979A | ||||
| JP8121964A |
Attorney, Agent or Firm:
Takeji Nara