Title:
SUBSTRATE END SURFACE-CLEANING DEVICE
Document Type and Number:
Japanese Patent JP2015080781
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a device to clean an end surface with respect to a front surface and a rear surface of a substrate.SOLUTION: A device 1 comprises: a guide unit 21 including a guide part 27 having a groove 24 through which an end surface 5a of a substrate 5 passes, on a front surface 22; and a brush 50 of which a position of a leading end 51 is controlled by a rear surface 23 of the guide part 27. The groove 24 includes an opening 25 penetrating the guide part 27, via which the leading end 51 of the brush 50 touches the end surface 5a of the substrate 5 passing through the groove 24. The guide unit 21 includes a recess 70 housing at least the leading end 51 of the brush 50, and a suction port 73 to suck dust from the recess 70.
Inventors:
YANAGISAWA SOICHI
Application Number:
JP2013221637A
Publication Date:
April 27, 2015
Filing Date:
October 24, 2013
Export Citation:
Assignee:
NAGAOKA SEISAKUSHO KK
International Classes:
B08B1/02; B08B5/04; H05K3/00
Attorney, Agent or Firm:
Akira Imai
Tsubasa Saito
Tsubasa Saito