Title:
基板の熱処理装置
Document Type and Number:
Japanese Patent JP5410119
Kind Code:
B2
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Inventors:
Katsuhisa Kasatsu
Yoshihiko Urasaki
Kubota Wataru
Yuya Nakanishi
Yoshihiko Urasaki
Kubota Wataru
Yuya Nakanishi
Application Number:
JP2009047893A
Publication Date:
February 05, 2014
Filing Date:
March 02, 2009
Export Citation:
Assignee:
Koyo Thermo System Co., Ltd.
International Classes:
H01L21/22; C23C16/02; H01L21/205; H01L21/31
Domestic Patent References:
| JP9148315A | ||||
| JP2004023049A | ||||
| JP11097446A | ||||
| JP2004221150A | ||||
| JP2008251927A | ||||
| JP3082016A |
Attorney, Agent or Firm:
Patent Business Corporation Suncrest International Patent Office