Title:
基板熱処理炉
Document Type and Number:
Japanese Patent JP4550098
Kind Code:
B2
Inventors:
Tadahiro Ohmi
Yusuke Muraoka
Miyaji Kyosho
Yusuke Muraoka
Miyaji Kyosho
Application Number:
JP2007242576A
Publication Date:
September 22, 2010
Filing Date:
September 19, 2007
Export Citation:
Assignee:
Tohoku University
Future Vision Co., Ltd.
Future Vision Co., Ltd.
International Classes:
F27D17/00; F27B5/16; F27D7/04
Domestic Patent References:
| JP2004206983A | ||||
| JP2002243368A | ||||
| JP10225610A | ||||
| JP2004333062A | ||||
| JP2008304182A | ||||
| JP2008002766A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita