Title:
SUBSTRATE HEATING DEVICE, SUBSTRATE HEATING METHOD, AND HEATER UNIT
Document Type and Number:
Japanese Patent JP2019087535
Kind Code:
A
Abstract:
To improve the balance of temperature distribution of an infrared heater.SOLUTION: A substrate heating device of an embodiment includes: a depressurizing section for depressurizing the atmosphere of a storage space for a substrate that is coated with a solution; and the infrared heater capable of heating the substrate with infrared rays. The infrared heater includes: a bent portion which is formed in a tubular shape bent at a plurality of points and which is bent so as to form a convex outward; and a cover portion disposed so as to cover at least part of the bent portion from the outside.SELECTED DRAWING: Figure 1
Inventors:
KATO SHIGERU
SAHODA TSUTOMU
YAMATANI KENICHI
SHO YOSHIAKI
SAHODA TSUTOMU
YAMATANI KENICHI
SHO YOSHIAKI
Application Number:
JP2018242542A
Publication Date:
June 06, 2019
Filing Date:
December 26, 2018
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
H05B3/00; F27B9/36; F27D11/02; H05B3/44
Domestic Patent References:
| JP3060663U | 1999-09-07 | |||
| JPH0845863A | 1996-02-16 | |||
| JPH0644090U | 1994-06-10 | |||
| JP2010262912A | 2010-11-18 | |||
| JP2011117678A | 2011-06-16 | |||
| JP2016031816A | 2016-03-07 | |||
| JP2003133249A | 2003-05-09 | |||
| JP2013089633A | 2013-05-13 | |||
| JP2005019479A | 2005-01-20 | |||
| JP2004253795A | 2004-09-09 |
Attorney, Agent or Firm:
Sumio Tanai
Matsumoto
Ryu Miyamoto
Masato Iida
Matsumoto
Ryu Miyamoto
Masato Iida