Title:
基板加熱装置及びポリイミド膜の製造方法
Document Type and Number:
Japanese Patent JP6718950
Kind Code:
B2
Abstract:
To improve the balance of temperature distribution of an infrared heater.SOLUTION: A substrate heating device of an embodiment includes: a depressurizing section for depressurizing the atmosphere of a storage space for a substrate that is coated with a solution; and the infrared heater capable of heating the substrate with infrared rays. The infrared heater includes: a bent portion which is formed in a tubular shape bent at a plurality of points and which is bent so as to form a convex outward; and a cover portion disposed so as to cover at least part of the bent portion from the outside.SELECTED DRAWING: Figure 1
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Inventors:
Shigeru Kato
Tsutomu Sabota
Kenichi Yamatani
Yoshiaki Masu
Tsutomu Sabota
Kenichi Yamatani
Yoshiaki Masu
Application Number:
JP2018242542A
Publication Date:
July 08, 2020
Filing Date:
December 26, 2018
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
H05B3/00; F27B9/36; F27D11/02; H05B3/44
Domestic Patent References:
| JP2013089633A | ||||
| JP2005019479A | ||||
| JP2011117678A | ||||
| JP2016031816A | ||||
| JP2003133249A | ||||
| JP2004253795A | ||||
| JP3060663U | ||||
| JP8045863A | ||||
| JP6044090U | ||||
| JP2010262912A |
Attorney, Agent or Firm:
Sumio Tanai
Matsumoto
Ryu Miyamoto
Masato Iida
Matsumoto
Ryu Miyamoto
Masato Iida