Title:
SUBSTRATE HOLDER AND SUBSTRATE CARRIER EQUIPPED WITH SUBSTRATE HOLDER
Document Type and Number:
Japanese Patent JP3119401
Kind Code:
B2
Abstract:
PURPOSE: To provide a substrate holder, which prevents occurrence of damage and/or stains of a substrate and which ensures a smooth delivery of the substrate and a substrate carrier equipped with the substrate holder.
CONSTITUTION: A regulating means 78 restricts the movement of a substrate 22 held by a substrate holder 24 in the direction in which respective holding members 72 to 73 are separated from each other, on the basis of the weight of the substrate 22. Accordingly, the substrate 22 will never incline and the damage due to mutual contact among substrates or an occurrence of stains caused by a processing liquid remaining among the substrates can be prevented. In addition, a delivery of the substrate to a pedestal 85 set up within a processing tank 11 can be smoothly carried out.
Inventors:
Tadayasu Ohsawa
Application Number:
JP4318693A
Publication Date:
December 18, 2000
Filing Date:
February 08, 1993
Export Citation:
Assignee:
Kaijo Co., Ltd.
International Classes:
B65G1/04; B65G1/00; B65G49/07; H01L21/304; H01L21/677; H01L21/68; (IPC1-7): B65G1/04; B65G49/07; H01L21/304; H01L21/68
Domestic Patent References:
| JP6244388A | ||||
| JP579941U |
Attorney, Agent or Firm:
Masaharu Hagiri
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