Title:
SUBSTRATE HOLDER
Document Type and Number:
Japanese Patent JP2003309167
Kind Code:
A
Abstract:
To provide a substrate holder capable of obtaining a high cooling effect for a substrate inspective of the conductivity or the insulability of the substrate.
The substrate holder for holding the substrate 2 which is an object to be treated in a vacuum atmosphere comprises: a cooling plate 4 for cooling the substrate 2; a film 3 arranged on the cooling plate 4, on which the substrate 2 is loaded; and a sealing means for sealing gas 8 which is a coolant in a sealed space 5 formed between the cooling plate 4 and the film 3.
Inventors:
OYA KATSUNORI
YAMAGUCHI HIROTO
KOIKE ATSUSHI
KANAI MASAHIRO
YAMAGUCHI HIROTO
KOIKE ATSUSHI
KANAI MASAHIRO
Application Number:
JP2002113344A
Publication Date:
October 31, 2003
Filing Date:
April 16, 2002
Export Citation:
Assignee:
CANON KK
International Classes:
C23C14/50; H01L21/68; H01L21/683; (IPC1-7): H01L21/68; C23C14/50
Attorney, Agent or Firm:
Nobuyuki Kaneda (2 others)
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