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Title:
SUBSTRATE HOLDING DEVICE
Document Type and Number:
Japanese Patent JPH11262828
Kind Code:
A
Abstract:

To provide a substrate holding device, which is applied to the process in the production of a flat display panel whose image quality is improved by preventing a transparent substrate from damaging and picture elements from shifting.

A substrate holding device for holding a substrate is provided with a first support plate 19a on which many suction holes 34 are formed and which has a substrate holding face 18a, which sucks and holds the substrate, a second support plate 19b arranged at a specified space to the first support plate 19a, and a stage 18 comprising a spacer 19c closing the space between the first support plate 19a and the second support plate 19b. The second support plate 19b of the stage 18 is fixed to the ball screw 102 of a travel mechanism 100, and the ball screw 102 is driven by a motor 104. When the stage 18 is pulled to the motor side by the travel mechanism 100, the center section of the stage 18 is bent by the work of a stopper 110.


Inventors:
OTAGURO HIROSHI
Application Number:
JP6535398A
Publication Date:
September 28, 1999
Filing Date:
March 16, 1998
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
B23Q3/08; F16B47/00; G02F1/13; G02F1/1333; G02F1/1339; (IPC1-7): B23Q3/08; F16B47/00; G02F1/13; G02F1/1333; G02F1/1339
Attorney, Agent or Firm:
Takehiko Suzue (6 outside)



 
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