Title:
SUBSTRATE HOLDING MEMBER AND METHOD FOR MANUFACTURING SUBSTRATE HOLDING MEMBER
Document Type and Number:
Japanese Patent JP2023076246
Kind Code:
A
Abstract:
To provide a substrate holding member capable of suppressing deformation of the outer peripheral portion of a substrate and easily adjusting a contact area with the substrate.SOLUTION: A substrate holding member 100 has a ceramic base 110. The upper surface 111 of the ceramic base 110 is provided with an annular projection 152 arranged on the outer periphery of the upper surface 111 and a plurality of projections 156 arranged inside the annular projection 152. An inner peripheral surface 152b of the annular protrusion 152 is an inclined surface that slopes inward toward the bottom.SELECTED DRAWING: Figure 2
Inventors:
TAKAHASHI KAZUYA
SHIMOJIMA HIROMASA
KITABAYASHI TETSUO
SHIMOJIMA HIROMASA
KITABAYASHI TETSUO
Application Number:
JP2021189557A
Publication Date:
June 01, 2023
Filing Date:
November 22, 2021
Export Citation:
Assignee:
NGK SPARK PLUG CO
International Classes:
H05B3/74; H01L21/683
Attorney, Agent or Firm:
Kijuro Kawakita
Masahiro Fujita
Masahiro Fujita
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