SUBSTRATE HOLDING MEMBER - TAIHEIYO CEMENT CORP

Title:

SUBSTRATE HOLDING MEMBER

Document Type and Number:

Japanese Patent JP2002164421

Kind Code:

A

Abstract:

To provide a substrate holding member having high rigidity in comparison with metal and does not cause a heat distortion to a substrate, and does not break like ceramic when impact is given.

A substrate holding member is composed of metal-ceramics composite material having a SiC powder content of 60-80 vol.% as a reinforcement and aluminum alloy of an Al-Si-Mg system in a matrix.

Inventors:

TSUTO HIROYUKI
ODANO CHOKUSUI
SHIMOJIMA HIROMASA

Application Number:

JP2000360923A

Publication Date:

June 07, 2002

Filing Date:

November 28, 2000

Export Citation:

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Assignee:

TAIHEIYO CEMENT CORP
CELANX KK

International Classes:

B65G49/06; B22D19/00; B65G49/07; C04B41/88; C22C1/10; C22C49/06; H01L21/677; H01L21/68; H01L21/683; C22C101/14; (IPC1-7): H01L21/68; B22D19/00; B65G49/06; B65G49/07; C04B41/88; C22C1/10; C22C49/06

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