To provide a substrate housing container and a method of manufacturing a lid body of the substrate housing container, for facilitating the work of inserting a gasket to a fitting and holding groove when closing and sealing the substrate housing container housing a substrate and reducing the variation of the sealing performance of the substrate housing container.
In the substrate housing container 1 including a container body 2 with an opening for housing the substrate, the lid body 3 for closing the opening, and the gasket 7 interposed between the container body 2 and the lid body 3, the lid body 3 is formed of a casing 4, a cover plate 6 and a frame body 5 provided on the outer side of the casing 4, the frame body 5 is held between the casing 4 and the cover plate 6, and the gasket 7 is held between the casing 4 and the frame body 5.
NAKAYAMA TAKAYUKI
Naotaka Kono
Kanji Arai
Akiko Ishii
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