To prevent a substrate from being deformed even if a conveying passage is long and convey the substrate with an excellent accuracy in a substrate inspection device.

This substrate inspection device comprises floating stages 1A, 2A, 3A for conveying a sheet-like substrate 4 as a subject and sucking and conveying parts 5, 6, 7 disposed on the sides of the floating stages in one of the directions crossing each other in the conveying direction, holding the end of the substrate 4, and imparting a conveying force to the substrate 4. The substrate 4 is conveyed by sequentially delivering the substrate 4 between the sucking and conveying parts.